VISUAL ALIGNMENT ROBOT SYSTEM: KINEMATICS, PATTERN RECOGNITION, AND CONTROL

SangJoo Kwon, Chansik Park

2007

Abstract

The visual alignment robot system for display and semiconductor fabrication process largely consists of multi-axes precision stage and vision peripherals. One of the central issues in a display or semiconductor mass production line is how to reduce the overall tact time by making a progress in the alignment technology between the mask and panel. In this paper, we suggest the kinematics of the 4PPR parallel alignment mechanism with four limbs unlike usual three limb cases and an effective pattern recognition algorithm for alignment mark recognition. The inverse kinematic solution determines the moving distances of joint actuators for an identified mask-panel misalignment. Also, the proposed alignment mark detection method enables considerable reduction in computation time compared with well-known pattern matching algorithms.

Paper Citation

in Harvard Style

Kwon S. and Park C. (2007). VISUAL ALIGNMENT ROBOT SYSTEM: KINEMATICS, PATTERN RECOGNITION, AND CONTROL . In Proceedings of the Fourth International Conference on Informatics in Control, Automation and Robotics - Volume 2: ICINCO, ISBN 978-972-8865-83-2, pages 36-43. DOI: 10.5220/0001632000360043

in Bibtex Style

@conference{icinco07,
author={SangJoo Kwon and Chansik Park},
title={VISUAL ALIGNMENT ROBOT SYSTEM: KINEMATICS, PATTERN RECOGNITION, AND CONTROL},
booktitle={Proceedings of the Fourth International Conference on Informatics in Control, Automation and Robotics - Volume 2: ICINCO,},
year={2007},
pages={36-43},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0001632000360043},
isbn={978-972-8865-83-2},
}

in EndNote Style

TY - CONF
JO - Proceedings of the Fourth International Conference on Informatics in Control, Automation and Robotics - Volume 2: ICINCO,
TI - VISUAL ALIGNMENT ROBOT SYSTEM: KINEMATICS, PATTERN RECOGNITION, AND CONTROL
SN - 978-972-8865-83-2
AU - Kwon S.
AU - Park C.
PY - 2007
SP - 36
EP - 43
DO - 10.5220/0001632000360043