Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements

Hung-Lin Hsieh, Wei-Cheng Wang, Ssu-Wen Pan

2013

Abstract

An innovative interferometer based on the heterodyne interferometry, grating shearing interferometry, and Michelson interferometry for precise displacement measurement is proposed. The system configuration is simple and easy to set-up. A heterodyne light beam is generated by using an Electro-Optic Modulating (EOM) technique for amplitude modulation. While the heterodyne light beam normally passes through a semi-transmission diffraction grating, the reflection part (Michelson interferometry) for out-of-plane displacement detection and the diffraction part (Grating interferometry) for in-plane displacement detection can then be obtained. The experimental results demonstrate the system has the capability of providing two-dimensional displacement information simultaneously. The measurement resolution and range can achieve to nanometer and millimeter levels.

Paper Citation

in Harvard Style

Hsieh H., Wang W. and Pan S. (2013). Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements . In Proceedings of the International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-8565-44-0, pages 56-62. DOI: 10.5220/0004340300560062

in Bibtex Style

@conference{photoptics13,
author={Hung-Lin Hsieh and Wei-Cheng Wang and Ssu-Wen Pan},
title={Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements},
booktitle={Proceedings of the International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2013},
pages={56-62},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004340300560062},
isbn={978-989-8565-44-0},
}

in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements
SN - 978-989-8565-44-0
AU - Hsieh H.
AU - Wang W.
AU - Pan S.
PY - 2013
SP - 56
EP - 62
DO - 10.5220/0004340300560062