A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design

Irina Livshits, Nenad Zoric

2016

Abstract

This paper describes a concept for designing a projection lens in lithographic optical system for 365 nm. Our approach for meeting this objective is to use the starting design obtained by artificial intelligence mode in Synopsys software. The proposed method describes the steps of getting a desired starting point of the optical system and the optimization problems in the optical system with a high numerical aperture.

Paper Citation

in Harvard Style

Livshits I. and Zoric N. (2016). A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design . In Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-174-8, pages 82-86. DOI: 10.5220/0005688500820086

in Bibtex Style

@conference{photoptics16,
author={Irina Livshits and Nenad Zoric},
title={A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design},
booktitle={Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2016},
pages={82-86},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005688500820086},
isbn={978-989-758-174-8},
}

in EndNote Style

TY - CONF
JO - Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - A Concept of Ultraviolet Lithography System and Design of its Rear Part using Artificial Intelligence for Starting Design
SN - 978-989-758-174-8
AU - Livshits I.
AU - Zoric N.
PY - 2016
SP - 82
EP - 86
DO - 10.5220/0005688500820086