Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform

Tobias Hegemann, Fabian Bürger, Josef Pauli

2017

Abstract

Multi- and hyperspectral measurement methods are a versatile approach to analyzing and understanding material properties. Especially imaging techniques allow for a precise sensing of surface properties. This paper presents a novel and multi-purpose metrology platform for high-resolution spectral measurements. The system is able to acquire multispectral images with six different spectral channels as well as hyperspectral point measurements and images. This is realized with a combined measurement head that includes a gray value camera as well as two spectrometers ranging from 190nm to 1,700nm. A three axis Cartesian robot with nanometer-precision allows the analysis of large samples with a size up to 40  10  10 cm and a weight of up to 25kg. Approaches to automatically focus both the camera and the spectrometers are presented. The calibration process between the camera and the spectrometers, which is necessary to acquire the full spectral information corresponding to each pixel of the camera image, is described. Example images and measurements are discussed to show the potential of the metrology platform.

Paper Citation

in Harvard Style

Hegemann T., Bürger F. and Pauli J. (2017). Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform . In Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-223-3, pages 215-222. DOI: 10.5220/0006134602150222

in Bibtex Style

@conference{photoptics17,
author={Tobias Hegemann and Fabian Bürger and Josef Pauli},
title={Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform},
booktitle={Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2017},
pages={215-222},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0006134602150222},
isbn={978-989-758-223-3},
}

in EndNote Style

TY - CONF
JO - Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform
SN - 978-989-758-223-3
AU - Hegemann T.
AU - Bürger F.
AU - Pauli J.
PY - 2017
SP - 215
EP - 222
DO - 10.5220/0006134602150222