Fabrication of Straight Stainless-Steel Micro-Coils for the Use of Biodevice Components

Toshiyuki Horiuchi, Hiroshi Sakabe, Takao Yuzawa, Daichi Yamamoto

2013

Abstract

Fabrication method of straight micro-coils of stainless steel was investigated for applying the coils to bio-measurements. As a non-magnetizable material, SUS304 stainless steel pipes with outer and inner diameters of 100 and 60 μm were used. Specimen pipes coated with positive resist films were exposed to a violet laser beam, and helical resist patterns were delineated. The pipes masked by the helical patterns were wetly etched in electrolytic etchant composed of sodium chloride, ammonium chloride, and boric acid. As a result, micro-coils with almost homogeneous widths were successfully fabricated. The calculated spring constant was in a favourable range of 0.7-2.4 N/mm. The new micro-coil fabrication method is feasible for the use of bio-device components.

Paper Citation

in Harvard Style

Horiuchi T., Sakabe H., Yuzawa T. and Yamamoto D. (2013). Fabrication of Straight Stainless-Steel Micro-Coils for the Use of Biodevice Components . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2013) ISBN 978-989-8565-34-1, pages 114-119. DOI: 10.5220/0004217201140119

in Bibtex Style

@conference{biodevices13,
author={Toshiyuki Horiuchi and Hiroshi Sakabe and Takao Yuzawa and Daichi Yamamoto},
title={Fabrication of Straight Stainless-Steel Micro-Coils for the Use of Biodevice Components},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2013)},
year={2013},
pages={114-119},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004217201140119},
isbn={978-989-8565-34-1},
}

in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2013)
TI - Fabrication of Straight Stainless-Steel Micro-Coils for the Use of Biodevice Components
SN - 978-989-8565-34-1
AU - Horiuchi T.
AU - Sakabe H.
AU - Yuzawa T.
AU - Yamamoto D.
PY - 2013
SP - 114
EP - 119
DO - 10.5220/0004217201140119