ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR

Kow-Ming Chang, Chu-Feng Chen, Yu-Bin Wang, Chung-Hsien Liu, Jiun-Ming Kuo, Chiung-Hui Lai

2011

Abstract

Nanowire is widely used in biological sensor because it has the high surface-to-volume ratio. Germanium (Ge) would be beneficial to enhance the sensitivity of silicon nanowire for bio-sensor. In this study, we have successfully fabricated the SiGe on Insulator (SGOI) nanowires with different annealing temperature by side-wall spacer technique, respectively. The 3-amino-propyltrime-thoxy-silane (APTS) is used to modify the surface, which can connect the bio-linker. Nanowire is considered as a resistance, and the change of conductance (G) and sensitivity (S) of different samples corresponding to APTS treatment were investigated. As annealing temperature was elevated from 800 to 950℃, the SiGe nanowire exhibited increasing sensitivity in the chemical detection. However, it was noted that degradation of sensitivity was observed as the annealing temperature increases up to 1000℃. This behavior may be associated with the reduction of the Ge concentration at the surface of SiGe nanowire due to high-temperature diffusion of Ge in Si. So, temperature is a key parameter in the annealing process producing two effects: repairs of defects and Ge diffusion. There would be an optimal annealing temperature between 900 and 1000℃.

Paper Citation

in Harvard Style

Chang K., Chen C., Wang Y., Liu C., Kuo J. and Lai C. (2011). ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011) ISBN 978-989-8425-37-9, pages 345-348. DOI: 10.5220/0003153503450348

in Bibtex Style

@conference{biodevices11,
author={Kow-Ming Chang and Chu-Feng Chen and Yu-Bin Wang and Chung-Hsien Liu and Jiun-Ming Kuo and Chiung-Hui Lai},
title={ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)},
year={2011},
pages={345-348},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0003153503450348},
isbn={978-989-8425-37-9},
}

in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)
TI - ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR
SN - 978-989-8425-37-9
AU - Chang K.
AU - Chen C.
AU - Wang Y.
AU - Liu C.
AU - Kuo J.
AU - Lai C.
PY - 2011
SP - 345
EP - 348
DO - 10.5220/0003153503450348