FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR

V. Russino, F. Pieri, D. Paci

2011

Abstract

In this work, the mass response of a resonant, CMOS (Complementary MOS) compatible MEMS sensor, oriented at the detection of diagnostic markers, is presented. The sensor is fabricated with a MEMS (Microelectro-mechanical System) post-processing method on a standard, CMOS-based VLSI technology, retaining maximum compatibility with the CMOS process flow. The mechanical resonator is based on inductive actuation and detection, and the sensing is based on the microbalance principle. A protocol for covalent bonding of organo-functional silanes (to be used as link sites for biomolecular probes) on the resonator surface is presented. The effect on the mechanical frequency response of a test mass attached to the surface is demonstrated by grafting of gold nanoparticles (NP’s) to the amino-terminated surface silanes.

Paper Citation

in Harvard Style

Russino V., Pieri F. and Paci D. (2011). FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011) ISBN 978-989-8425-37-9, pages 391-396. DOI: 10.5220/0003167803910396

in Bibtex Style

@conference{biodevices11,
author={V. Russino and F. Pieri and D. Paci},
title={FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)},
year={2011},
pages={391-396},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0003167803910396},
isbn={978-989-8425-37-9},
}

in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)
TI - FREQUENCY CHARACTERIZATION OF A MAGNETICALLY ACTUATED MEMS RESONANT BIOSENSOR
SN - 978-989-8425-37-9
AU - Russino V.
AU - Pieri F.
AU - Paci D.
PY - 2011
SP - 391
EP - 396
DO - 10.5220/0003167803910396