HIGH-DENSITY CMOS ARRAY FOR BI-DIRECTIONAL COUPLING OF ELECTROGENIC CELLS

U. Yegin, M. Schindler, S. Ingebrandt, A. Offenhaeusser, M. Seo, C. S. Hwang

2011

Abstract

We present a CMOS chip with a 64x64 array of high-density pixels designed for recording electrical signals from cells and stimulating them. A high spatial resolution can be achieved, since the pixels have a pitch of 12.5 µm. Each pixel incorporates a floating-gate-field-effect-transistor with a 4.4 µm x 4.4 µm electrode coupled to its gate. The remaining components of the measurement setup required to operate the CMOS chip are also introduced. A simple post-process, required to deposit a thin film high-k (multilayers of TiO2 and HfO2) material on the chip was developed after the fabrication of the chip and is also introduced here.

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Paper Citation


in Harvard Style

Yegin U., Schindler M., Ingebrandt S., Offenhaeusser A., Seo M. and S. Hwang C. (2011). HIGH-DENSITY CMOS ARRAY FOR BI-DIRECTIONAL COUPLING OF ELECTROGENIC CELLS . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011) ISBN 978-989-8425-37-9, pages 415-421. DOI: 10.5220/0003192204150421

in Bibtex Style

@conference{biodevices11,
author={U. Yegin and M. Schindler and S. Ingebrandt and A. Offenhaeusser and M. Seo and C. S. Hwang},
title={HIGH-DENSITY CMOS ARRAY FOR BI-DIRECTIONAL COUPLING OF ELECTROGENIC CELLS},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)},
year={2011},
pages={415-421},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0003192204150421},
isbn={978-989-8425-37-9},
}


in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)
TI - HIGH-DENSITY CMOS ARRAY FOR BI-DIRECTIONAL COUPLING OF ELECTROGENIC CELLS
SN - 978-989-8425-37-9
AU - Yegin U.
AU - Schindler M.
AU - Ingebrandt S.
AU - Offenhaeusser A.
AU - Seo M.
AU - S. Hwang C.
PY - 2011
SP - 415
EP - 421
DO - 10.5220/0003192204150421