Tunable Fabry-Pérot Filter for Optical Glucose Monitoring

Xin Zhao, Schmidt J. Dominik

2014

Abstract

This paper presents a Tunable MEMS Fabry-Pérot (FP) filter for the application of optical glucose sensor in Long-Wave Infrared (LWIR) range. The structure design, simulation, fabrication process and testing system are reported. The spectral wavelength tuning range from 10.9 μm to 12.19 μm was designed for the transmission peak which is related to the glucose concentration. A tuning distance between top and bottom reflector of 2.25µm has been achieved, while maintaining a relatively low tuning voltage of 20V. The Tunable FP filter is the core part of glucose sensor and has other applications in Bio-sensor, hyperspectral imaging and tunable lasers, etc.

Paper Citation

in Harvard Style

Zhao X. and J. Dominik S. (2014). Tunable Fabry-Pérot Filter for Optical Glucose Monitoring . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2014) ISBN 978-989-758-013-0, pages 171-175. DOI: 10.5220/0004871101710175

in Bibtex Style

@conference{biodevices14,
author={Xin Zhao and Schmidt J. Dominik},
title={Tunable Fabry-Pérot Filter for Optical Glucose Monitoring},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2014)},
year={2014},
pages={171-175},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004871101710175},
isbn={978-989-758-013-0},
}

in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2014)
TI - Tunable Fabry-Pérot Filter for Optical Glucose Monitoring
SN - 978-989-758-013-0
AU - Zhao X.
AU - J. Dominik S.
PY - 2014
SP - 171
EP - 175
DO - 10.5220/0004871101710175